Class description of clean room

The standard class of clean room is defined as follows: Class X (at Y μm)

Where X is the class of the clean room, such as 100 or 10000, and Y is the particle size such as μm, μm, etc. This means that the user stipulates that the particle content of the clean room must meet the limit of the level at these particle sizes. Here are a few examples:

Class1 μm, μm, μm)

Class 100μm, μm)

Class 100μm, μm, μm)

In Classes 100 and Greater (Class 100, 1000, 10000…), generally one particle size is enough. In Classes Less than 100 (Class 10, 1….), it generally depends on several particle sizes.

The second is to specify the state of the clean room, for example:

Class X (at Y μm ), At-rest

The third is to customize the upper limit of particle concentration. Generally, the dust-free workshop is very clean in As-built, and the particle control ability test is not easy. At this time, you can simply lower the upper limit of acceptance, for example:

Class 10000 μm <= 10000), As-built

Class 10000 μm <= 1000), As-built

The purpose of this is to ensure that the clean room still has sufficient particle control capabilities when it is in the Operational state.

The following two tables are the grade definition of Fed-Std-209E and the grade definition of ISO-14644.

Fed-Std-209E cleanliness definition

Class Name Class Limits
μm μm μm μm 5μm
Volume Units Volume Units Volume Units Volume Units Volume Units
SI U.S. (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3) (m3) (ft3)
M 1 350
M 1 1,240 265 106
M 2 3,500 757 309 100
M 10 12,400 350 2,650 1,060 353
M 3 35,000 991 7,570 214 3,090 1,000
M 100 26,500 750 10,600 300 3,530 100
M 4 75,700 2140 30,900 875 10,000 283
M 1,000 35,300 1,000 247
M 5 100,000 2,830 618
M 10,000 353,000 10,000 2,470
M 6 1,000,000 28,300 6,180 175
M 100,000 3,530,000 100,000 24,700 700
M 7 10,000,000 283,000 61,800 1,750

ISO-14644 cleanliness definition

ISO classification number(N) Maximum concentration limits (particles/m3of air) for particles equal to and larger than the considered sizes shown below (concentration limits are calculated in accordance with equation (1).
1mm 5mm
ISO Class 1 10 2
ISO Class 2 100 24 10 4
ISO Class 3 1 000 237 102 35 8
ISO Class 4 10 000 2 370 1 020 352 83
ISO Class 5 100 000 23 700 10 200 3 520 832 29
ISO Class 6 1 000 000 237 000 102 000 35 200 8 320 293
ISO Class 7 352 000 83 200 2 930
ISO Class 8 3 520 000 832 000 29 300
ISO Class 9 35 200 000 8 320 000 293 000
NOTE Uncertainties related to the measurement process requires that concentration data with no more then three significant figures be used in determining the classification level. Equation (1): Cn = 10NX D) where Cn is particle concentration, N is cleanliness, and D is particle size

Comparing the above two tables, we can draw the following conclusions:

  1. Although there are formulas for interchange between the metric and imperial standards, it is still difficult to see their relevance. Two systems put the same table, it is easy to cause confusion
  2. It appears in almost every grade definition in the two tables, and the particle size is very representative
  3. In terms of the classification of cleanliness, whether it is high cleanliness or low cleanliness, the range of ISO-14644 is wider than that of 209E, so it has a future

Classification of clean room grade standards

The cleanliness level standard ISO14644 classifies the air cleanliness level in clean rooms (zones) and related controlled environments according to the only indicator of suspended particle concentration, and only considers the particle size limit (lower limit) to the cumulative distribution of particles within the range . According to the particle diameter, it can be divided into regular particles (~), ultrafine particles (<) and macro particles (>).

Air cleanliness classification standard: ISO14644-1 (international standard)

Air cleanliness classification (N) Maximum concentration limit of particles greater than or equal to the marked particle size (pcs/m3 of air particles)
ISO Class1 10 2
ISO Class2 100 24 10 4
ISO Class3 1,000 237 102 35 8
ISO Class4 10,000 2,370 1,020 352 83
ISO Class5 100,000 23,700 10,200 3,520 832 29
ISO Class6 1,000,000 237,000 102,000 35,200 8,320 293
ISO Class7 352,000 83,200 2,930
ISO Class8 3,520,000 832,000 29,300
ISO Class9 35,200,000 8,320,000 293,000
Note: Due to the uncertainty involved in the measurement process, no more than three effective concentration figures are required to determine the level

Air cleanliness classification standard: GB/T16292-1996 (Chinese standard)

Particle size, Air cleanliness classification Maximum allowable number of dust/m3 Larger allowable number of microorganisms
Floating bacteria/m3 Settling bacteria/dish
Class 100 3,500 0 5 1
Class 1,000 35,000 200 50 2
Class 10,000 350,000 2,000 100 3
Class 100,000 3,500,000 20,000 500 10
Class 300,000 10,500,000 60,000 15

Air cleanliness classification standard: GB/T16292-1996(USA Federal Standard)

  • Comparison of the cleanliness level of particles in the air
  • Air particle cleanliness level (per cubic meter, per cubic foot) maximum concentration limit of particles
ISO14644-1 FEDSTD209E CLASS
ISOClass English Metric 5um
m3 m3 m3 ft3 m3
1 ISO1 10 2
2 ISO2 100 26 10 4
3 1 1SO3 1000 265 106 35
4 10 ISO4 10000 2650 1,060 10 353
5(百级) 100 ISO5 26500 10600 3530
6(千级) 1000 ISO6 1000000 265000 106000 1000 35300 293
7(万级) 10,000 ISO7 10000 353000 2930
8(十万级) 100,000 ISO8 100000 3530000 29300
9 ISO9 1,000,000 35300000 293000

Air cleanliness standards for clean rooms (zones) of pharmaceutical production in China

Class Maximum allowable number of dust/m3 Larger allowable number of microorganisms
≥5um Floating bacteria/m3 Settling bacteria/dish
100 3,500 0 5 1
10000 350,000 2000 100 3
100000 3,500,000 20,000 500 10
300000 10,500,000 61,800 NA 15

 

Approximate comparison table of cleanliness grades in various countries based on ≥ particle size

个/M3≥ ISO14644-1(1999) US209D(1988) FRANCEAFNOR(1981) GERMANYVDI 2083(1990)
1
2 0 2
M1
3 1 1 3
100 M2
353 4 10 2
1000 M3
3530 5 100 A+B 4000 3 5
10000 M4
35300 6 1000 1000 4 6
100000 M5
353000 7 10000 400000 5
1000000 M6
3530000 8 100000 D 4000000 6 8
10000000 M7

 

The cleanliness level of suspended particles in the air of clean rooms and clean areas

The cleanliness level of suspended particles in the air of clean rooms and clean areas
Air cleanliness level(N) Greater than or equal to the maximum concentration limit of the particle size in the table (pc/m3)
1um 5um
1 10 2
2 100 24 10 4
3 1,000 237 102 35 8
4(十级) 10000 1020 83
5(百级) 100000 23700 10200 3520 832 29
6(千级) 1,000,000 237000 102000 35200 8320 293
7(万级) 352000 83200 2,930
8(十万级) 3520000 832000 29,300
9(一百万级) 8320000 293,000
National standardGB50073-2001